Apparatus and methods for determining overlay of structures having rotational or mirror symmetry

ABSTRACT

Disclosed are overlay targets having flexible symmetry characteristics and metrology techniques for measuring the overlay error between two or more successive layers of such targets. In one embodiment, a target includes structures for measuring overlay error (or a shift) in both the x and y direction, wherein the x structures have a different center of symmetry (COS) than the y structures. In another embodiment, one of the x and y structures is invariant with a 180° rotation and the other one of the x and y structures has a mirror symmetry. In one aspect, the x and y structures together are variant with a 180° rotation. In yet another example, a target for measuring overlay in the x and/or y direction includes structures on a first layer having a 180 symmetry and structures on a second layer having mirror symmetry. In another embodiment, a target for determining overlay in the x and/or y direction includes structures on a first layer and structures on a second layer, wherein the structures on the first layer have a COS that is offset by a known amount from the COS of the structures on the second layer. In a specific implementation, any of the disclosed target embodiments may take the form of device structures. In a use case, device structures that have an inherent 180° rotational symmetry or a mirror symmetry in each of the first and second layers are used to measure overlay in a first layer and a second layer. Techniques for imaging targets with flexible symmetry characteristics and analyzing the acquired images to determine overlay or alignment error are disclosed.

CROSS REFERENCE TO RELATED PATENT APPLICATION

This application claims priority and is a Divisional application ofcopending application Ser. No. 11/227,764, entitled “APPARATUS ANDMETHODS FOR DETERMINING OVERLAY OF STRUCTURES HAVING ROTATIONAL ORMIRROR SYMMETRY”, filed 14 Sep. 2005 by Mark Ghinovker, whichapplication claims priority of (a) and is a Continuation-in-partapplication of application Ser. No. 09/894,987, filed on Jun. 27, 2001,now U.S. Pat. No. 7,068,833, issued on 27 Jun. 2006, which claimspriority of Application No. 60/229,256, filed 30 Aug. 2000 and (b) U.S.Provisional Patent Application No. 60/698,535, entitled “APPARATUS ANDMETHODS FOR DETERMINING OVERLAY STRUCTURES HAVING ROTATIONAL OR MIRRORSYMMETRY”, filed 11 Jul. 2005 by Mark Ghinovker, and (c) is aContinuation-in-part application of application Ser. No. 10/729,838,filed on Dec. 5, 2003, now U.S. Pat. No. 7,317,531, issued on 8 Jan.2008, which application claims priority of (i) Application No.60/440,970, filed 17 Jan. 2003, (ii) Application No. 60/449,496, filed22 Feb. 2003, (iii) Application No. 60/431,314, filed 5 Dec. 2002, (iv)Application No. 60/504,093, filed 19 Sep. 2003, and (v) Application No.60/498,524, filed 27 Aug. 2003. These applications and patents areincorporated herein by reference in their entirety for all purposes.

BACKGROUND OF THE INVENTION

The present invention relates generally to overlay measurementtechniques, which are used in semiconductor manufacturing processes.More specifically, the present invention relates to techniques formeasuring alignment error between different layers or different patternson the same layer of a semiconductor wafer stack.

The measurement of overlay error between successive patterned layers ona wafer is one of the most critical process control techniques used inthe manufacturing of integrated circuits and devices. Overlay accuracygenerally pertains to the determination of how accurately a firstpatterned layer aligns with respect to a second patterned layer disposedabove or below it and to the determination of how accurately a firstpattern aligns with respect to a second pattern disposed on the samelayer. Presently, overlay measurements are performed via test patternsthat are printed together with layers of the wafer. The images of thesetest patterns are captured via an imaging tool and an analysis algorithmis used to calculate the relative displacement of the patterns from thecaptured images.

The most commonly used overlay target pattern is the “Box-in-Box”target, which includes a pair of concentric squares (or boxes) that areformed on successive layers of the wafer. The overlay error is generallydetermined by comparing the position of one square relative to anothersquare.

To facilitate discussion, FIG. 1 is a top view of a typical “Box-in-Box”target 10. As shown, the target 10 includes an inner box 12 disposedwithin an open-centered outer box 14. The inner box 12 is printed on thetop layer of the wafer while the outer box 14 is printed on the layerdirectly below the top layer of the wafer. As is generally well known,the overlay error between the two boxes, along the x-axis for example,is determined by calculating the locations of the edges of lines c1 andc2 of the outer box 14, and the edge locations of the lines c3 and c4 ofthe inner box 12, and then comparing the average separation betweenlines c1 and c3 with the average separation between lines c2 and c4.Half of the difference between the average separations c1&c3 and c2&c4is the overlay error (along the x-axis). Thus, if the average spacingbetween lines c1 and c3 is the same as the average spacing between linesc2 and c4, the corresponding overlay error tends to be zero. Althoughnot described, the overlay error between the two boxes along the y-axismay also be determined using the above technique.

This type of target has a same center of symmetry (COS) for both the xand y structures, as well as for the first and second layer structures.When the target structures are rotated 180° about their COS, theymaintain a same appearance. Conventionally, it has been a requirementthat both the x and y structures and both the first and second layerstructures have a same COS. However, these requirements may be toorestrictive under certain conditions. For example, space may be limitedon the wafer and a target having x and y structures (or first and secondlayer structures) with the same COS may not fit into the availablespace. Additionally, it may be desirable to use device structures fordetermining overlay, and device structures are not likely to meet thisstrict requirement.

Although this conventional overlay design has worked well, there arecontinuing efforts to provide improved techniques for determining orpredicting overlay in device structures. For example, targets or devicestructures that have more flexible symmetry characteristics, as well astechniques for determining overlay with such structures, are needed.

SUMMARY OF THE INVENTION

In general, overlay targets having flexible symmetry characteristics andmetrology techniques for measuring the overlay error between two or moresuccessive layers of such targets or a shift between two sets ofstructures on the same layer are provided. In one embodiment, a targetincludes structures for measuring overlay error (or a shift) in both thex and y direction, wherein the x structures have a different center ofsymmetry (COS) than the y structures. In another embodiment, one of thex and y structures is invariant with a 180° rotation and the other oneof the x and y structures has a mirror symmetry. In one aspect, the xand y structures together are variant with a 180° rotation. In yetanother example, a target for measuring overlay in the x and/or ydirection includes structures on a first layer having a 180 symmetry andstructures on a second layer having mirror symmetry. In anotherembodiment, a target for determining overlay in the x and/or y directionincludes structures on a first layer and structures on a second layer,wherein the structures on the first layer have a COS that is offset by aknown amount from the COS of the structures on the second layer. In aspecific implementation, any of the disclosed target embodiments maytake the form of device structures. In a use case, device structuresthat have an inherent 180° rotational symmetry or a mirror symmetry ineach of the first and second layers are used to measure overlay in afirst layer and a second layer. Techniques for imaging targets withflexible symmetry characteristics and analyzing the acquired images todetermine overlay or alignment error are disclosed.

In one embodiment, a semiconductor target for determining a relativeshift between two or more successive layers of a substrate or betweentwo or more separately generated patterns on a single layer of asubstrate is disclosed. This target includes a plurality of firststructures having a first center of symmetry (COS) or first line ofsymmetry (LOS) and being arranged to determine the relative shift in anx direction by analyzing an image of the first structures. This targetfurther includes a plurality of second structures having a second COS orsecond LOS and being arranged to determine the relative shift in an xdirection by analyzing an image of the second structures. The first COSor LOS has a different location than the second COS or LOS.

In a further aspect, the first structures have a first LOS about whichthe first structures have a mirror symmetry or the first structures havea 180° rotational symmetry with respect to the first COS, and the secondstructures have a first LOS about which the second structures have amirror symmetry or the second structures have a 180° rotational symmetrywith respect to the second COS. In another aspect, the first and secondstructures are in the form of device structures. In a furtherembodiment, a one of the first or second structures has a 180°rotational symmetry with respect to its COS and the other one of thefirst or second structures' has a mirror symmetry with respect to itsLOS. In yet a further implementation, the first structures and thesecond structures together are variant with a 180° rotational asymmetryor together have a mirror asymmetry.

In an alternative embodiment, a semiconductor target for determining anoverlay error between two or more successive layers of a substrate isdisclosed. This target comprises a plurality of first structures formedin a first semiconductor layer and having a first center of symmetry orfirst line of symmetry (LOS) and a plurality of second structures formedin a second semiconductor layer and having a second COS OR LOS. Thefirst COS OR LOS is designed to have a known offset from the second COSor LOS so that the overlay error can be determined by acquiring an imageof the first and second structures and then analyzing a shift betweenthe first and second COS's or LOS's in the image and comparing the shiftto the known offset.

In a specific implementation, the first structures have a first LOSabout which the first structures have a mirror symmetry or the firststructures have a 180° rotational symmetry with respect to the firstCOS, and the second structures have a first LOS about which the secondstructures have a mirror symmetry or the second structures have a 180°rotational symmetry with respect to the second COS. In yet a furtheraspect, the first and second structures are in the form of devicestructures. In another implantation, a one of the first or secondstructures has a 180° rotational symmetry with respect to its COS andthe other one of the first or second structures' has a mirror symmetrywith respect to its LOS. In a further implementation, the firststructures and the second structures together are variant with a 180°rotational asymmetry or together have a mirror asymmetry.

In another embodiment, the invention pertains to a method fordetermining the relative shift between two or more successive layers ofa substrate or between two or more separately generated patterns on asingle layer of a substrate. A first image is acquired of a plurality offirst structures having a first center of symmetry (COS) or first lineof symmetry (LOS) and being arranged to determine the relative shift inan x direction by analyzing an image of the first structures. A firstimage is acquired of a plurality of second structures having a secondCOS or second LOS and being arranged to determine the relative shift inan x direction by analyzing an image of the second structures. The firstCOS or LOS has a different location than the second COS or LOS. Thefirst image of the first structures' COS is analyzed to determinewhether the first structures have a shift in the x direction that is outof specification, and the second image of the second structures' COS isanalyzed determine whether the second structures have a shift in the ydirection that is out of specification.

In a specific aspect, the first and second images are acquired togetherin a same field of view. In another aspect, analyzing the first imagecomprises (i) when it is determined that the first structures fail tohave a 180 rotational or mirror symmetry, determining that the firststructures are out of specification; and (ii) when it is determined thatthe second structures fail to have a 180 rotational or mirror symmetry,determining that the second structures are out of specification. Inanother feature, analyzing the first image and analyzing the secondimage each includes (i) using outside edges of each region of interestof the first or second image to determine a COS or LOS for a first setof substructures and a COS or LOS for a second set of substructures, and(ii) when the COS or LOS of the first set of substructures differs fromthe COS or LOS of the second set of substructures by more than apredetermined amount, determining that the corresponding structures areout of specification. In a further aspect, the first set ofsubstructures are formed from a first layer and the second set ofsubstructures are formed from a second layer.

In yet another implementation, analyzing the first image and analyzingthe second image each includes (i) for a first set of substructures,selecting an initial COS or LOS between a plurality of regions ofinterest, (ii) for the first set of substructures, automatically placingits 180 degree or mirror counterpart based on the initial COS or LOS,respectively, for each of the first and second images, (iii), for thefirst set of substructures, continuing to move the initial COS or LOSuntil a best correlation is found between the first substructures andtheir counterpart, (iv) repeating operations (i) through (iii) for asecond set of substructures, (v) when a best correlation is found forboth the first and second substructures and when the COS or LOS of thefirst set of substructures differs from the COS or LOS of the second setof substructures by more than a predetermined amount, determining thatthe corresponding first structures are out of specification. In afurther aspect, the first set of substructures are formed from a firstlayer and the second set of substructures are formed from a secondlayer.

In a further method embodiment, the overlay error between two or moresuccessive layers of a substrate is determined. An image is acquired ofa plurality of first structures formed in a first semiconductor layerand having a first center of symmetry (COS) or line of symmetry (LOS)and a plurality of second structures formed in a second semiconductorlayer and having a second COS or LOS. The first COS or LOS is designedto have a known offset from the second COS or LOS so that the overlayerror can be determined by acquiring an image of the first and secondstructures and then analyzing a shift between the first and second COS'sor LOS's in the image and comparing the shift to the known offset. Theimage of the first and second structures' COS or LOS is analyzed todetermine whether there is an overlay error between the first and secondstructures that is out of specification.

In a specific implementation, the first structures have a first LOSabout which the first structures have a mirror symmetry or the firststructures have a 180° rotational symmetry with respect to the firstCOS, and the second structures have a first LOS about which the secondstructures have a mirror symmetry or the second structures have a 180°rotational symmetry with respect to the second COS. In anotherimplementation, the first and second structures are in the form ofdevice structures. In another embodiment, a one of the first or secondstructures has a 180° rotational symmetry with respect to its COS andthe other one of the first or second structures' has a mirror symmetrywith respect to its LOS. In another aspect, the first structures and thesecond structures together are variant with a 180° rotational asymmetryor together have a mirror asymmetry.

These and other features and advantages of the present invention will bepresented in more detail in the following specification of the inventionand the accompanying figures which illustrate by way of example theprinciples of the invention.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention is illustrated by way of example, and not by wayof limitation.

FIG. 1 is a top plan view of a box-in-box type overlay mark.

FIG. 2 is a top plan view of overlay targets for measuring overlay errorbetween two different process layers in both an x and y direction inaccordance with one embodiment of the present invention.

FIG. 3 is a diagrammatic top view an overlay target, wherein one of itsx and y direction structures has a 180° rotational symmetry while theother of its x and y direction structures has a mirror symmetry, inaccordance with an alternative embodiment of the present invention.

FIG. 4A is a diagrammatic top view of an overlay target in accordancewith a specific implementation of the present invention.

FIG. 4B is a diagrammatic top view of an overlay target in accordancewith an alternative implementation of the present invention.

FIGS. 4C through 4E together illustrate a technique for formingcombination dummy and overlay structures, as well as example structures,in accordance with specific implementations of the present invention.

FIG. 5 is a flowchart illustrating a procedure for inspecting targets inaccordance with techniques of the present invention.

FIG. 6 is a flowchart illustrating the operation of FIG. 5 fordetermining whether a target is out of specification in accordance witha specific implementation of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

Reference will now be made in detail to a specific embodiment of theinvention. An example of this embodiment is illustrated in theaccompanying drawings. While the invention will be described inconjunction with this specific embodiment, it will be understood that itis not intended to limit the invention to one embodiment. On thecontrary, it is intended to cover alternatives, modifications, andequivalents as may be included within the spirit and scope of theinvention as defined by the appended claims. In the followingdescription, numerous specific details are set forth in order to providea thorough understanding of the present invention. The present inventionmay be practiced without some or all of these specific details. In otherinstances, well known process operations have not been described indetail in order not to unnecessarily obscure the present invention.

In general, the present invention provides semiconductor targets fordetermining an overlay error between two process layers or a shiftbetween two sets of structures on the same layer, where the targetstructures are designed with a known relationship between their symmetrycharacteristics. Although the following target examples are shown tohave structures on two layers for measuring overlay, it is readilyapparent that each target may include two sets of structures on the samelayer for determining a shift error between such set of structures.

FIG. 2 is a top plan view of overlay targets for measuring overlay errorbetween two different process layers in both an x and y direction inaccordance with one embodiment of the present invention. As shown, afirst target 202 is arranged for measuring an overlay error between aset of first structures 206 in a first layer and a set of secondstructures 208 in a second layer with respect to an x direction. Asecond target 204 is arranged for measuring an overlay error between aset of first structures 212 in a first layer and a set of secondstructures 214 in a second layer with respect to a y direction.

In this embodiment, each of the x and y targets are designed so that itsfirst structures have a same 180° rotational center of symmetry as itssecond structures although the x direction target 202 is designed tohave a center of symmetry (COS) 210 that has a different location thanthe y direction target 204 COS 214. For example, the x direction target202 has first structures that are divided into two groups 206 a and 206b that are positioned with respect to each other so that if they wererotated 180° about a center of symmetry 210, the first structures wouldhave a same appearance before and after such rotation. The x directiontarget 204 also includes second structures 208 that are divided into twogroups 208 a and 208 b that are positioned with respect to each other sothat if they were rotated 180° about a center of symmetry 210, the firststructures would have a same appearance before and after such rotation.In this illustration, the COS of the first structures is at the sameposition as the COS of the second structures. When a overlay error ispresent within a target, the COS of the first structures of such targetis shifted from the COS of the second structures. This shift is calledthe overlay error.

The overlay error in separate x and y targets may be determined based ona priori knowledge that each target is designed to have structures ineach layer that have a 180° rotational symmetry about a same COS. Anyshift between the COS's of the first and second layer structures may beimaged and measured as an overlay error. In alternative embodiments, thex and/or y targets of FIG. 2 may be arranged so that the first andsecond structures have a COS with a known offset. In this case, if theshift does not match the known offset, the amount of variancecorresponds to the overlay error.

FIG. 3 is a diagrammatic top view an overlay target 300, wherein one ofits x and y direction structures has a 180° rotational symmetry whilethe other of its x and y direction structures has a mirror symmetry, inaccordance with an alternative embodiment of the present invention. Asshown, the target 300 includes x direction structures 306 and 308 and ydirection structures 302 and 304. The x direction structures include afirst set of structures 306 a and 306 b on a first layer and a secondset of structures 308 a and 308 b on a second layer. The y directionstructures include a first set of structures 302 a and 302 b on a firstlayer and a single structure 304 on a second layer. The first and secondstructures of the x direction target are designed to have a 180°rotational symmetry with respect to a same center of symmetry (COS) 310,while the first and second structures of the y direction target aredesigned to have a mirror symmetry with respect to a same line ofsymmetry (LOS) 312. A shift between either the COS's or LOS's of thefirst and second layer structures can be imaged and measured todetermine an overlay error in the x or y direction, respectively. Inalternative embodiments, the x and/or y targets of FIG. 3 may bearranged so that the first and second structures have COS's or LOS'swith a known offset. In this case, if the shift does not match the knownoffset, the amount of variance corresponds to the overlay error.

Targets having flexible symmetry characteristics may be in the form ofdevice structures. In other words, device structures which have inherentsymmetrical properties, such as a 180 rotational symmetry and/or amirror symmetry for structures in a first and second layer may be used.These structures may also have a known offset between their COS's orLOS's. Such devices may be identified by the designer and identified bytags in the design layout. Alternatively, such “target” devices may belocated manually or automatically after fabrication.

The target structures of the present invention may have any suitableshape and arrangement so as to provide flexible symmetrycharacteristics. FIGS. 4A and 4B illustrate various examples of targetshapes and arrangements. Although the targets are shown as havingstructures on a first layer with a same COS as structures on a secondlayer, the first and second layer structures may easily be designed tohave different COS's. These FIGS. 4A and 4B are merely meant toillustrate the different shapes that the targets of the presentinvention may take.

FIG. 4A is a diagrammatic top view of an overlay target in accordancewith a specific implementation of the present invention. Each set oftarget structures in each layer may include any number and shape ofstructures. A first set of structures in a first layer (shaded black)includes structure 402 a through 402 d which have a center of symmetry410. Structures 402 a and 402 c are 7 sided polygons, while structures402 b and 402 d are triangles. A second set of structures in a secondlayer (shaded gray) includes structure 404 a through 404 d which havethe same center of symmetry 410 as the first set of structures in thefirst layer. Structures 404 a and 404 c are star shaped polygons, whilestructures 404 b and 404 d are cross shaped polygons. In one embodimentof the present invention, the center of symmetry of the first layerstructures is offset from the center of symmetry of the second layerstructures by a known distance (not shown).

FIG. 4B is a diagrammatic top view of an overlay target in accordancewith an alternative implementation of the present invention. In thisembodiment, each structure includes a plurality of horizontal orvertical lines in two different layers. A first layer is shaded black,while a second layer is shaded gray. Each horizontal and vertical linemay also be formed from a plurality of segments (not shown). As shown,horizontal structures 452 a, 452 b, 452 e and 452 f and verticalstructures 452 b, 452 c, 452 d, 452 g, and 452 h have a same center ofsymmetry 454. Additionally, the different layers of each set of verticaland horizontal structures are shown as having a same center of symmetry.In a specific implementation of the present invention, the center ofsymmetry of the horizontal structures is offset from the center ofsymmetry vertical structures by a known distance (not shown). In anotherspecific implementation of the present invention, the center of symmetryof the first layer structures (from the horizontal and/or verticalstructures) is offset from the center of symmetry of the second layerstructures (from the horizontal and/or vertical structures) by a knowndistance (not shown).

The target rules preferably include a requirement that the target beplaced in a layer which is measurable or inspectable by a particulartype of tool. For example, the target may have to be on a top layer orbe covered with only optically transparent layers so that the target maybe inspected by an optical tool. In other applications, the target maybe required to be underneath an opaque layer so that the opaque layer'sconformance to the underlying target may be inspected and/or measured.Additionally, each inspection, review, or metrology tool typically has asize constraint as to the measured or inspected structure. That is,structures below a particular size cannot be seen. Therefore, thetargets must be sized so that they can be measured or inspected by therelevant tool.

The targets of the present invention described herein may be placed inany suitable space on the wafer. By way of examples, the targets may beplaced in the scribe line or within the dies themselves. When targetsare placed in a die, the die layout may also be analyzed to determinewhether particular portions or areas have a characteristic whichnegatively or positively affects metrology or inspection results, ascompared with other areas of the die layout. For example, particularlayout characteristics may result in more reliable or accurate metrologyor inspection results. In one specific case, targets may be placed inareas which have characteristics that positively affect the metrology orinspection. In an example of such a feature characteristic, a chemicalmechanical polishing (CMP) procedure is typically tuned to achievesuperior accuracy with a particular feature density range. Thus,targets, such as overlay targets, may be placed in layout regions whichare within the particular feature density range for an optimal CMPprocess.

The circuit designer may be aware of feature locations in the die layoutwhich are most susceptible to error or defects. The designer maycommunicate the position of such features to the target placementsoftware or layout engineer so that targets may be placed proximate tosuch problem features. This placement technique would likely result in ahigher incidence of defect capture and more reliable resulting products.

The targets may also be placed within a dummy layer. It is commonpractice in semiconductor manufacturing today to include dummystructures in open areas of the circuit layout to ensure uniform patterndensity. Dummy structures are generally used for optimal results inchemical mechanical polishing and other semiconductor manufacturingprocesses.

In order to enable targets inside the chip area, there are significantadvantages in combining the functionality of the particular metrology(or inspection) target with the purpose of the dummy structures. Thatis, a structure which has two components that serve both purposes of adummy structure and a metrology (or inspection) target would efficientlyutilize the open spaces of the die area to increase CMP uniformity (andother dummy requirements where applicable), as well as to provide ametrology or inspection target. Additionally, a new type of metrology orinspection may be used with such combination marks. For example, aparticular design pattern's fidelity may be monitored via suchcombination target. That is, a designer's intent regarding a particularpattern's function or structure may be verified with respect to thepattern being combined and measured or inspected in a dummy structure.

A combination target and dummy structure can be achieved in a number ofdifferent ways. In one example of a combination dummy and overlaystructure, the structures can be designed on two masks such that theyform interlaced periodic structures. Any suitable types of overlaystructures may be altered to have flexible COS's or LOS's as describedherein. Suitably modifiable overlay targets and techniques fordetermining overlay with same are described in the following U.S.patents and applications: (1) U.S. Pat. No. 6,462,818, issued 8 Oct.2002, entitled “OVERLAY ALIGNMENT MARK DESIGN”, by Bareket, (2) U.S.Pat. No. 6,023,338, issued 8 Feb. 2000, entitled “OVERLAY ALIGNMENTMEASUREMENT OF WAFER”, by Bareket, (3) application Ser. No. 09/894,987,filed 27 Jun. 2001, entitled “OVERLAY MARKS, METHODS OF OVERLAY MARKDESIGN AND METHODS OF OVERLAY MEASUREMENTS”, by Ghinovker et al., (4)U.S. Pat. No. 6,486,954, issued 26 Nov. 2002, entitled “OVERLAYALIGNMENT MEASUREMENT MARK” by Levy et al., (5) application Ser. No.10/367,124, filed 13 Feb. 2004, entitled OVERLAY METROLOGY AND CONTROLMETHOD, by Mike Adel et al, (6) application Ser. No. 10/785,396 filed 23Feb. 2004, entitled APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORSUSING SCATTEROMETRY, by Walter D. Mieher, et al., (7) application Ser.No. 10/729,838 filed 5 Dec. 2003, entitled APPARATUS AND METHODS FORDETECTING OVERLAY ERRORS USING SCATTEROMETRY, by Walter D. Mieher, etal., and (8) application Ser. No. 10/858,836 filed 1 Jun. 2004, entitledAPPARATUS AND METHODS FOR PROVIDING IN-CHIP MICROTARGETS FOR METROLOGYOR INSPECTION, by Avi Cohen et al. These patents and applications areall incorporated herein by reference in their entirety.

An overlay type combination and dummy structure includes two componentsone on a first layer or mask and one on a second layer or mask. Eachcomponent preferably complies with the requirements for a dummystructure of the process step associated with that layer or mask. Afurther example may be a case where these periodic structures arealigned such that the component on a first mask is symmetricallypositioned with respect to the component on a second mask when the masksare correctly aligned. Also, the component on a first mask may bedesigned to fit into the open spaces within the component on a secondmask and visa versa. As a further particular example, the periodiccomponent on the two masks could be identical but offset by half a unitcell of the periodic structure along both x and y axes. Alternativelythe component on a first mask may have a different structure than thecomponent on a second mask but is still offset by half a unit cell ofthe component as above. Example overlay type combination targets areshown in FIG. 4C through 4E.

Each component may also contain an additional coarse segmentation whichis periodic and is designed to improve the contrast and informationcontent for the metrology tool as further described in the abovereferenced U.S. application Ser. No. 10/367,124 by Mike Adel et al.

FIGS. 4C through 4E together illustrate a technique for formingcombination dummy and overlay structures, as well as example structures,in accordance with specific implementations of the present invention. Anopen space may be filled with any suitably sized and shaped combinationdummy and target structures (referred to herein as targets). As shown inFIG. 4C, an array of targets are formed within an open area. The targetsinclude a first set of structures on a first layer (e.g., the “+” shapedstructures) and a second set of structures on a second layer (e.g., thehexagon shaped structures). Note that the first set of structures has aCOS 410, while the second set of structures have a second COS 412 thatis offset from the first COS 410.

In another technique, an array of targets may be conceptually used tofill in around actual device structures. As shown in FIG. 4D, an arrayof hexagon shaped and “+” shaped structures are overlaid onto two devicestructures. For illustration purposes, one device structure is shapedlike a star and is on a same layer as the hexagon target structures,while another device structure is shaped like an arrow and is on thesame layer as the “+” shaped target structures. After the target arrayis overlaid with the device structures, some of the target structuresare removed to accommodate the device structures. That is, targetstructures on one layer are removed from an area encompassing the devicestructure on the same layer. As shown, the “+” shaped structures areremoved from an area encompassing the arrow shaped device structure, andthe hexagon shaped structures are removed from an area encompassing thestar shaped device structure. The target structures are removed suchthat a COS of each layer is maintained. For example, the first layerstructures have a first COS 420 that differs from the second COS 422 ofthe second layer structures.

If the device structures on two different layers are overlapping,however, both layers of targets are removed from an area encompassingthe two overlapping device structures as illustrated in FIG. 4E. In thisexample, the target structures are also removed such that a COS of eachlayer is maintained. For example, the first layer structures have afirst COS 430 that differs from the second COS 432 of the second layerstructures.

In these combination dummy and target examples, a signal is detectedfrom the field of views (FOV's) as represented in FIGS. 4C-4E. Thecenter of symmetries of the first and second layers are determined. Inembodiments of the present invention, the center of symmetries aredesigned to be located at a known offset from each other so that adiscrepancy can be translated into an overlay value. In alternativeembodiments, a first set of structures are used to measure overlay in anx direction and a set of second structures are used to measure overlayin a y direction. The x direction structures have a center of symmetryor line of symmetry that differs from the y direction structures.

When the FOV includes both targets and devices as in FIGS. 4D and 4E, itis first determined which parts of the signal are noise (or devicestructures) and which parts correspond to the target structures. Thisdetermination may be determined in suitable manner. In one embodiment,the signal (or image generated from such signal) is compared to a designfile which identifies device structures and the device structures'contribution to the signal (or image) is subtracted from the signal (orimage). The resulting signal (or image) corresponds to the target whichmay then be assessed as previously described. Alternatively, one maymanually train the metrology tool to locate targets by manually movingthe tool to known target locations and identifying the targets. Theseidentified targets can then be used by the metrology tool to search forother targets with a similar appearance using standard patternrecognition techniques. Alternatively, a representative target in thedesign file may be used to train the metrology tool. The representativetarget may also be located in a easily found position, such as thescribe line.

In general, rules for both dummy structures and the particular targettype are followed when forming combination dummy and target structures.For instance, the dummy structure rules may require a particular patterndensity or maximum open space size for ensuring a particular level ofCMP uniformity. Additionally, the particular metrology or inspectionprocedure rules for the targets are followed. In one type of overlaymetrology technique, the structures on two different layers are assessedto determine whether their centers of symmetry are where they should be(e.g., aligned or offset by a known distance) to thereby determineoverlay. In this example, the structures are designed on two differentlayers and have a same center of symmetry or known offset centers ofsymmetry.

After a die and targets are fabricated, the targets may be inspected,reviewed, or measured in any suitable manner. FIG. 5 is a flowchartillustrating a procedure 500 for inspecting targets fabricated from alayout pattern generated in accordance with techniques of the presentinvention. Initially, each target is inspected or measured to determinewhether a process is out of specification in operation 502. It is thendetermined whether a process is out of specification in operation 503.If a process is not out of specification, the inspection, review, ormeasurement procedure ends.

If a process is out of specification, a number of techniques may beimplemented to alleviate the problem. In a first technique, a subsequentprocess may be adjusted to compensate for the process which is out ofspecification in operation 504. For example, if it is determined thatthe photoresist pattern is misaligned in any portion, the photoresistmay then be stripped and reapplied in a corrected pattern to eliminatethe misalignment. The subsequent process is then performed so as tocontinue fabrication of the same die in operation 506. For example, thewafer may be patterned. In a second technique, processing of the die maybe halted in operation 508. The die may then be discarded in operation510. The process which is out of specification may then be adjusted forsubsequent die(s) in operation 512.

One may determine whether the targets with flexible COS's and/or LOS'sof the present invention are within specification in any suitablemanner. FIG. 6 is a flow chart illustrating the operation 503 of FIG. 5for determining whether a target is out of specification in accordancewith a specific implementation of the present invention. Although thisprocedure is described with respect to a target having structures with a180° rotational COS, of course, this procedure may be easily modifiedfor structures with mirror symmetry. This procedure may also be appliedto determining an alignment error between two sets of structures on thesame layer, rather than an overlay error on two different layers asillustrated.

In the illustrated example of FIG. 6, the center of either X or Y targetstructures are initially moved to the center of the FOV of theinspection tool in operation 602. The region of interests (ROI's) ofeach layer are then determined in operation 604. The x target structuresof FIG. 2 will be used to illustrate the procedure of FIG. 6. Forexample, four ROI's may be formed for the x direction target structures206 a, 206 b, 208 a and 208 b of FIG. 2, as represented by the dottedlines. The dotted line 202 may represent the FOV of the inspection tool,while the cross 210 represents the center of the x target structures.

The COS for each set of structures 206 and 208 from the first and secondlayers, respectively, may be determined using any suitable technique.For example, an edge technique may be utilized to determine COS for thestructures in each layer. In the illustrated embodiment, the outsideedges of each ROI of each layer are used to determine the COS for eachlayer in operation 606. For the structures 206 and 208, the outsideedges of each ROI may be determined and then the edges are then used tofind a center position between the outside edges of each set ofstructures (e.g., between structures 206 a and structures 206 b). Forstructures having subresolution features (e.g., target of FIG. 4B), theedge of each set of subresolution lines (e.g., the first layer lines ofset 452 a) would be measured as a single edge.

Another COS determination technique is referred to as the correlationtechnique. In this technique, an initial COS position is estimatedbetween the ROI's of the structures of each layer in operation 608. Asshown for the structures 206, an initial estimate of COS 210 may bepositioned between structures 206 a and 206 b. Two linear arrays arethen obtained by measuring across the two sets of structures atpositions that are equal distances from the initial COS. The structures206 a and 206 b will tend to each result in a periodic signal with threepeak intensity values. The two obtained linear arrays are then flippedhorizontally and vertically and matched and a metric of correlation suchas the product is calculated. The arrays are moved with respect to oneanother and the metric is calculated for each offset. The metric is thenplotted and the correct COS is located by finding the maximum of thecorrelation metric. Intelligent searching algorithms (e.g., a binarysearch) may also be used to efficiently locate the correct COS position.

Said in another way, for each ROI set of each layer, its 180° rotationcounterpart is automatically placed based on the initial COS inoperation 610. The COS is continually moved for each layer until thebest correlation is found between the rotated image and original imagesof each layer in operation 612. After the best correlation is found, theCOS is found.

After the COS is found using any suitable technique, it is thendetermined whether the COS of the first layer structures differs fromthe COS of the second layer structures by more than a predeterminedvalue in operation 614. If they do not differ by more than thepredetermined value, it is determined that the x or y target underanalysis in not out of specification in operation 618. However, if theydo differ by more than the predetermined amount, it is determined thatthe x or y target under analysis is out of specification in operation616. The procedure for determining whether the target is out ofspecification then ends.

The techniques of the present invention may be implemented in anysuitable combination of software and/or hardware system. Regardless ofthe system's configuration, it may employ one or more memories or memorymodules configured to store data, program instructions for thegeneral-purpose inspection operations and/or the inventive techniquesdescribed herein. The program instructions may control the operation ofan operating system and/or one or more applications, for example. Thememory or memories may also be configured to store layout patterns,layout constraint rules and target rules.

Because such information and program instructions may be employed toimplement the systems/methods described herein, the present inventionrelates to machine readable media that include program instructions,state information, etc. for performing various operations describedherein. Examples of machine-readable media include, but are not limitedto, magnetic media such as hard disks, floppy disks, and magnetic tape;optical media such as CD-ROM disks; magneto-optical media such asfloptical disks; and hardware devices that are specially configured tostore and perform program instructions, such as read-only memory devices(ROM) and random access memory (RAM). The invention may also be embodiedin a carrier wave traveling over an appropriate medium such as airwaves,optical lines, electric lines, etc. Examples of program instructionsinclude both machine code, such as produced by a compiler, and filescontaining higher level code that may be executed by the computer usingan interpreter.

Although the foregoing invention has been described in some detail forpurposes of clarity of understanding, it will be apparent that certainchanges and modifications may be practiced within the scope of theappended claims. Therefore, the described embodiments should be taken asillustrative and not restrictive, and the invention should not belimited to the details given herein but should be defined by thefollowing claims and their full scope of equivalents.

1. A semiconductor target for determining a relative shift between twoor more successive layers of a substrate or between two or moreseparately generated patterns on a single layer of a substrate, thetarget comprising: a plurality of first structures having a first centerof symmetry (COS) or first line of symmetry (LOS) and being arranged todetermine the relative shift in an x direction by analyzing an image ofthe first structures; and a plurality of second structures having asecond COS or second LOS and being arranged to determine the relativeshift in an x direction by analyzing an image of the second structures,wherein the first COS or LOS has a different location than the secondCOS or LOS.
 2. The target of claim 1, wherein the first structures havea first LOS about which the first structures have a mirror symmetry orthe first structures have a 180° rotational symmetry with respect to thefirst COS, and the second structures have a first LOS about which thesecond structures have a mirror symmetry or the second structures have a180° rotational symmetry with respect to the second COS.
 3. The targetof claim 1, wherein the first and second structures are in the form ofdevice structures.
 4. The target of claim 2, wherein a one of the firstor second structures has a 180° rotational symmetry with respect to itsCOS and the other one of the first or second structures' has a mirrorsymmetry with respect to its LOS.
 5. The target of claim 4, wherein thefirst structures and the second structures together are variant with a180° rotational asymmetry or together have a mirror asymmetry.
 6. Asemiconductor target for determining an overlay error between two ormore successive layers of a substrate, the target comprising: aplurality of first structures formed in a first semiconductor layer andhaving a first center of symmetry or first line of symmetry (LOS); and aplurality of second structures formed in a second semiconductor layerand having a second COS OR LOS, wherein the first COS OR LOS is designedto have a known offset from the second COS or LOS so that the overlayerror can be determined by acquiring an image of the first and secondstructures and then analyzing a shift between the first and second COS'sor LOS's in the image and comparing the shift to the known offset. 7.The target of claim 6, wherein the first structures have a first LOSabout which the first structures have a mirror symmetry or the firststructures have a 180° rotational symmetry with respect to the firstCOS, and the second structures have a first LOS about which the secondstructures have a mirror symmetry or the second structures have a 180°rotational symmetry with respect to the second COS.
 8. The target ofclaim 6, wherein the first and second structures are in the form ofdevice structures.
 9. The target of claim 7, wherein a one of the firstor second structures has a 180° rotational symmetry with respect to itsCOS and the other one of the first or second structures' has a mirrorsymmetry with respect to its LOS.
 10. The target of claim 9, wherein thefirst structures and the second structures together are variant with a180° rotational asymmetry or together have a mirror asymmetry.structures together are variant with a 180° rotational asymmetry ortogether have a mirror asymmetry.